Hot filament assisted metalorganic vapor-phase deposition of GaN

Journal article

Peer reviewed

T Boufaden, A Rebey and B EL JANI

Journal of crystal growth, Vol.206(1-2), pp.1-7

01/10/1999

Abstract

Chemistry

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

General and physical chemistry

III-V semiconductors

Materials science

Methods of deposition of films and coatings; film growth and epitaxy

Other semiconductors

Physics

Solid-gas interface

Specific materials

Surface physical chemistry

Vapor phase epitaxy; growth from vapor phase

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Title: Hot filament assisted metalorganic vapor-phase deposition of GaN
Creators - without role: T Boufaden - University of Monastir
A Rebey - University of Monastir
B EL JANI - University of Monastir
Publication Details: Journal of crystal growth, Vol.206(1-2), pp.1-7
Publisher: Elsevier
Identifiers: 9928473208331
Academic Unit: Qassim University
Language: English
Resource Type: Journal article