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In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts
Journal article   Peer reviewed

In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts

Areej Alzahrani, Thomas G. Allen, Michele De Bastiani, Emmanuel Van Kerschaver, George T. Harrison, Wenzhu Liu and Stefaan De Wolf
Advanced materials interfaces, Vol.7(21), pp.2000589-n/a
01/11/2020

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