In situ optical monitoring of the decomposition of GaN thin films

Journal article

Peer reviewed

A Rebey, T Boufaden and B EL JANI

Journal of crystal growth, Vol.203(1-2), pp.12-17

01/05/1999

Abstract

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Methods of deposition of films and coatings; film growth and epitaxy

Physics

Vapor phase epitaxy; growth from vapor phase

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Title: In situ optical monitoring of the decomposition of GaN thin films
Creators - without role: A Rebey - University of Monastir
T Boufaden - University of Monastir
B EL JANI - University of Monastir
Publication Details: Journal of crystal growth, Vol.203(1-2), pp.12-17
Publisher: Elsevier
Identifiers: 9928614408331
Academic Unit: Qassim University
Language: English
Resource Type: Journal article