In situ reflectance monitoring of the growth and etching of AlAs/GaAs structures in MOVPE

Journal article

Peer reviewed

A Rebey, M. M Habchi, A Bchetnia and B EL JANI

Journal of crystal growth, Vol.261(4), pp.450-457

01/02/2004

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation

Physics

Semiconductors

Surface cleaning, etching, patterning

Surface treatments

Visible and ultraviolet spectra

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Title: In situ reflectance monitoring of the growth and etching of AlAs/GaAs structures in MOVPE
Creators - without role: A Rebey - University of Monastir
M. M Habchi - University of Monastir
A Bchetnia - University of Monastir
B EL JANI - University of Monastir
Publication Details: Journal of crystal growth, Vol.261(4), pp.450-457
Publisher: Elsevier
Identifiers: 9928796008331
Academic Unit: Qassim University
Language: English
Resource Type: Journal article