Abstract
Thermal and mechanical relaxation times play vital roles in the values of the quality factor of micro/nanoresonators. They can control the energy dissipation across the coupling of mechanical and thermal behavior. In this paper, we introduce an analytical model that considers a pre-stress in a micro-viscothermoelastic resonator to modify the thermal and mechanical relaxation times and thus higher the quality factor. The impacts of length scale and static pre-stress on the quality factor have been discussed. The model expects that significant improvement in terms of quality factors is possible by tuning the pre-stress and the thermal and mechanical relaxation times parameters, and the isothermal value of frequency have significant effects on the thermal quality factor of the resonators.