Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Journal article

Peer reviewed

Mohammad I Younis, Ronald Miles and Daniel Jordy

Journal of micromechanics and microengineering, Vol.16(11), pp.2463-2474

01/11/2006

PMCID: 3123889

PMID: 21720492

Abstract

Applied sciences

Electronics

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Mechanical engineering. Machine design

Mechanical instruments, equipment and techniques

Microelectronic fabrication (materials and surfaces technology)

Micromechanical devices and systems

Physics

Precision engineering, watch making

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces
Creators - without role: Mohammad I Younis - Binghamton University
Ronald Miles - Department of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, United States
Daniel Jordy - Department of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, United States
Publication Details: Journal of micromechanics and microengineering, Vol.16(11), pp.2463-2474
Publisher: Institute of Physics
Identifiers: 9943859708331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article