Investigation of zirconium oxynitride thin films deposited by reactive pulsed magnetron sputtering

Journal article

Peer reviewed

S. H Mohamed, A. M ABD EL-RAHMAN and Mahrous R Ahmed

Journal of physics. D, Applied physics, Vol.40(22), pp.7057-7062

21/11/2007

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties

Exact sciences and technology

Insulators

Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation

Optical properties of specific thin films

Physics

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Title: Investigation of zirconium oxynitride thin films deposited by reactive pulsed magnetron sputtering
Creators - without role: S. H Mohamed - Sohag University
A. M ABD EL-RAHMAN - Sohag University
Mahrous R Ahmed - Sohag University
Publication Details: Journal of physics. D, Applied physics, Vol.40(22), pp.7057-7062
Publisher: Institute of Physics
Identifiers: 9938164708331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article