Abstract
Room temperature ion beam mixing of a Sb/glass system, induced by 300 keV collimated Ar
+
ion beams from the Jordan Van de Graff Accelerator, was studied by means of Rutherford backscattering spectrometry (RBS). The RBS spectra of 2.0 MeV He
++
ions were collected for the system before, after and at various irradiated doses. The sputtering effect and the kinetics of the atomic mixing were successfully analyzed.