Abstract
Bilayer system of Pd/Ge is irradiated at room temperature using a 400 keV Ar+ beam. The evolution of the intermixed layer at the interface in this system is studied by Rutherford backscattering spectrometry (RBS), and by measurement of the variation in resistance. The experimental results are compared with the existing theoretical models. Both RBS and resistance measurements indicate that Pd and Ge atoms in this system are found to follow collisional cascade processes and to a less degree, thermal spike processes.