Kinetics of the formation of cobalt disilicide at high temperature under rapid electron beam heating

J Warris; M Suleman; F Mahmood

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Kinetics of the formation of cobalt disilicide at high temperature under rapid electron beam heating

J Warris, M Suleman and F Mahmood

Journal of Materials Science, Lett, Vol.13(2), pp.96-98

01/01/1994

Abstract

CoSi sub 2 phase is formed not from a direct reaction of Co with the crystalline Si substrate, but as a result of the reaction between the grown CoSi sub 2 phase and Si. Rapid e-beam annealing allows growth kinetics of the CoSi sub 2 phase to be determined at 700-1000 degrees C.

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Title: Kinetics of the formation of cobalt disilicide at high temperature under rapid electron beam heating
Creators - without role: J Warris
M Suleman
F Mahmood
Publication Details: Journal of Materials Science, Lett, Vol.13(2), pp.96-98
Identifiers: 9943956908331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article