Abstract
We report the fabrication of capacitors with large surface area carbon nanosheet bottom electrodes and conformal strontium titanate dielectric. The leakage current in these capacitors is dominated by Schottky emission when injecting electrons from the carbon nanosheets and Poole-Frenkel in the opposite direction. The capacitance dependence on voltage and frequency reveals that the carbon nanosheets behave like a metallic electrode with high conductivity. At the same time, the amount of traps in the dielectric is low. A capacitance density of similar to 1 mu F/cm(2) is found for devices with a 40 nm thick strontium titanate layer. (C) 2014 The ElectroChemical Society. All rights reserved.