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Laser-assisted maskless Cu patterning on porous silicon
Journal article

Laser-assisted maskless Cu patterning on porous silicon

Junji Sasano, Patrik Schmuki, Tetsuo Sakka and Yukio Ogata
Electrochemical and solid-state letters, Vol.7(5), pp.G98-G101
01/01/2004

Abstract

Maskless Cu patterning on porous silicon (PS) assisted by a focused laser beam is demonstrated. Cu was selectively electroplated only at the illuminated part of PS by utilizing the rectifying properties of the Schottky barrier formed at a p-type semiconductor/solution interface. Applying this principle, Cu deposition was achieved in the presence of Cl(-) ions necessary for inhibition of the immersion plating reaction.

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