Ligand stabilised dialkyl aluminium amides as new precursors for aluminium nitride thin films

Journal article

Peer reviewed

Jayaprakash Khanderi, Daniel Rische, Hans W Becker and Roland A Fischer

Journal of materials chemistry, Vol.14(21), pp.3210-3214

01/01/2004

Abstract

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Physics

1 Record Views

Title: Ligand stabilised dialkyl aluminium amides as new precursors for aluminium nitride thin films
Creators - without role: Jayaprakash Khanderi - Ruhr University Bochum
Daniel Rische - Ruhr University Bochum
Hans W Becker - Ruhr University Bochum
Roland A Fischer - Ruhr University Bochum
Publication Details: Journal of materials chemistry, Vol.14(21), pp.3210-3214
Publisher: Royal Society of Chemistry
Identifiers: 9945057308331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article