Macropore growth in a prepatterned p-type silicon wafer

Journal article

Peer reviewed

K. Kobayashi, F. A. Harraz, S. Izuo, T. Sakka and Y. H. Ogata

Physica status solidi. A, Applications and materials science, Vol.204(5), pp.1321-1326

05/2007

Abstract

81.65.Cf

82.45.Qr

82.45.Vp

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Title: Macropore growth in a prepatterned p-type silicon wafer
Creators - without role: K. Kobayashi - Kyoto University
F. A. Harraz - Central Metallurgical Research and Development Institute
S. Izuo - Mitsubishi Electric
T. Sakka - Kyoto University
Y. H. Ogata - Kyoto University
Publication Details: Physica status solidi. A, Applications and materials science, Vol.204(5), pp.1321-1326
Publisher: WILEY-VCH Verlag
Number of pages: 6
Identifiers: 9924777908331
Academic Unit: Najran University
Language: English
Resource Type: Journal article