Abstract
The ability to grow VO2 films by electrochemical methods would open a low-cost, easily scalable production route to a number of electronic devices. We have synthesized VOx films by anodic electrodeposition of V2O5, followed by partial reduction by annealing in Ar. The resulting films are heterogeneous, consisting of various metallic/oxide phases and including regions with VO2 stoichiometry. A gradual metal insulator transition with a nearly two order of magnitude change in film resistance is observed between room temperature and 140 degrees C. In addition, the films exhibit a temperature coefficient of resistance of -2.4%/degrees C from 20 to 140 degrees C. (C) 2013 AIP Publishing LLC.