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Micromachined threshold inertial switches: a review
Journal article   Open access  Peer reviewed

Micromachined threshold inertial switches: a review

Qiu Xu and Mohammad Younis
Journal of micromechanics and microengineering, Vol.32(6), p.63001
01/06/2022

Abstract

Engineering Engineering, Electrical & Electronic Instruments & Instrumentation Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics Technology
url
https://doi.org/10.1088/1361-6439/ac6192View
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