Mighty MESs: Special Issue on Semiconductor Factory Automation, Part 1: System-Level Automation

Journal article

Peer reviewed

Robin G Qiu and MENGCHU Zhou

IEEE robotics & automation magazine, Vol.11(1), pp.19-25

2004

Abstract

Applied sciences

Automata. Logic controller

Computer science; control theory; systems

Control theory. Systems

Design. Technologies. Operation analysis. Testing

Electronics

Exact sciences and technology

Integrated circuits

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Mighty MESs
Creators - without role: Robin G Qiu - Pennsylvania State University
MENGCHU Zhou - New Jersey Institute of Technology
Publication Details: IEEE robotics & automation magazine, Vol.11(1), pp.19-25
Publisher: Institute of Electrical and Electronics Engineers
Identifiers: 9937018008331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article