Model for the evolution of Nb-Si-N thin films as a function of Si content relating the nanostructure to electrical and mechanical properties

Journal article

Peer reviewed

C. S Sandu, M Benkahoul, R Sanjines and F Levy

Surface & coatings technology, Vol.201(6), pp.2897-2903

04/12/2006

Abstract

Applied sciences

Exact sciences and technology

Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology

Metals. Metallurgy

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Title: Model for the evolution of Nb-Si-N thin films as a function of Si content relating the nanostructure to electrical and mechanical properties
Creators - without role: C. S Sandu - École Polytechnique Fédérale de Lausanne
M Benkahoul - École Polytechnique Fédérale de Lausanne
R Sanjines - École Polytechnique Fédérale de Lausanne
F Levy - École Polytechnique Fédérale de Lausanne
Publication Details: Surface & coatings technology, Vol.201(6), pp.2897-2903
Publisher: Elsevier
Identifiers: 9929438908331
Academic Unit: Taibah University
Language: English
Resource Type: Journal article