Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems : A Petri net approach : Special section on Petri nets in semiconductor manufacturing

Journal article

Peer reviewed

M Zhou and M. D Jeng

IEEE transactions on semiconductor manufacturing, Vol.11(3), pp.333-357

1998

Abstract

Applied sciences

Design. Technologies. Operation analysis. Testing

Electronics

Exact sciences and technology

Integrated circuits

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems : A Petri net approach : Special section on Petri nets in semiconductor manufacturing
Creators - without role: M Zhou - New Jersey Institute of Technology
M. D Jeng - National Taiwan Ocean University
Publication Details: IEEE transactions on semiconductor manufacturing, Vol.11(3), pp.333-357
Publisher: Institute of Electrical and Electronics Engineers
Identifiers: 9937147208331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article