Modeling and design of variable-geometry electrostatic microactuators

Journal article

Peer reviewed

F Najar, S Choura, S EL-BORGI, E. M ABDEL-RAHMAN and A. H Nayfeh

Journal of micromechanics and microengineering, Vol.15(3), pp.419-429

01/03/2005

Abstract

Applied sciences

Electronics

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Mechanical engineering. Machine design

Mechanical instruments, equipment and techniques

Microelectronic fabrication (materials and surfaces technology)

Micromechanical devices and systems

Physics

Precision engineering, watch making

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Modeling and design of variable-geometry electrostatic microactuators
Creators - without role: F Najar - Tunisia Polytechnic School
S Choura - Tunisia Polytechnic School
S EL-BORGI - Tunisia Polytechnic School
E. M ABDEL-RAHMAN - Virginia Tech
A. H Nayfeh - Virginia Tech
Publication Details: Journal of micromechanics and microengineering, Vol.15(3), pp.419-429
Publisher: Institute of Physics
Identifiers: 9926004408331
Academic Unit: Prince Sattam Bin Abdulaziz University
Language: English
Resource Type: Journal article