Abstract
We develop a mathematical model of a microgyroscope whose principal component is a rotating cantilever beam equipped with a proof mass at its end. The microgyroscope undergoes two flexural vibrations that are coupled via base rotation about the microbeam longitudinal axis. The primary vibratory motion is produced in one direction (drive direction) of the microbeam by a pair of DC and AC voltages actuating the proof mass. The microbeam angular rotation induces a secondary vibration in the orthogonal (sense) direction actuated by a second DC voltage. Closed-form solutions are developed for the linearized problem to study the relationship between the base rotation and gyroscopic coupling. The response of the microgyroscope to variations in the DC voltage across the drive and sense electrodes and frequency of excitation are examined and a calibration curve of the gyroscope is obtained analytically. (C) 2010 Elsevier Ltd. All rights reserved.