Abstract
Design of experiments and multiphysics analyses were used to develop a parametric model for a d (33)-based cantilever. The analysis revealed that the most significant parameters influencing the resonant frequency are the supporting layer thickness, piezoelectric layer thickness, and cantilever length. On the other hand, the most important factors affecting the charge output are the piezoelectric thickness and the interdigitated electrode dimensions. The accuracy of the developed model was confirmed and showed less than 1% estimation error compared with a commercial simulation package. To estimate the power delivered to a load, the electric current output from the piezoelectric generator was calculated. A circuit model was built and used to estimate the power delivered to a load, which compared favorably to experimentally published power data on actual cantilevers of similar dimensions.