Abstract
We report on the growth of Co–Mn–Ge thin films on various substrates using low-temperature molecular beam epitaxy. The magnetic and transport properties of the films were investigated. The close-to-stoichiometric Co
2MnGe film grown on GaAs(1
0
0) shows ferromagnetism and exhibits anomalous Hall effects at room temperature. The irreversibility of zero-field-cooled and field-cooled measurements suggests the formation of superparamagnetic clusters. On the other hand, the growth of Co
2MnGe films on Ge buffer layer and Si(1
0
0) substrate is found to be unsuitable due to the degraded crystal qualities with weak magnetization signals.