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Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy
Journal article   Peer reviewed

Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy

N. Jouini, A. Gautier, P. Revel, P-E. Mazeran and M. Bigerelle
International journal of surface science and engineering, Vol.3(4), pp.310-327
01/01/2009

Abstract

Engineering Engineering, Mechanical Materials Science Materials Science, Coatings & Films Materials Science, Multidisciplinary Physical Sciences Physics Physics, Applied Science & Technology Technology

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