Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)

Journal article

Peer reviewed

M. Brunet, H. Mahfoz Kotb, L. Bouscayrol, E. Scheid, M. Andrieux, C. Legros and S. Schamm-Chardon

Thin solid films, Vol.520(9), pp.3709-3709

29/02/2012

Abstract

Materials Science

Materials Science, Coatings & Films

Materials Science, Multidisciplinary

Physical Sciences

Physics

Physics, Applied

Physics, Condensed Matter

Science & Technology

Technology

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Title: Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors (vol 519, pg 5638, 2011)
Creators - without role: M. Brunet - Université de Toulouse
H. Mahfoz Kotb - Assiut University
L. Bouscayrol - Université de Toulouse
E. Scheid - Université de Toulouse
M. Andrieux - University of Paris-Sud
C. Legros - University of Paris-Sud
S. Schamm-Chardon - Université de Toulouse
Publication Details: Thin solid films, Vol.520(9), pp.3709-3709
Publisher: Elsevier
Number of pages: 1
Identifiers: 9920017108331
Academic Unit: King Faisal University
Language: English
Resource Type: Journal article