Abstract
A porous GaAs layer has been formed by electrochemical anodization in HF based solution on extremely doped p-type GaAs substrate. Porous nature of the elaborated sample has been evidenced by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Nanostructurale nature of the porous layer has been demonstrated by X-ray diffraction analysis (XRD) and confirmed by photoluminescence spectroscopy (PL).