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Numerical 3D simulation of surface wave excitation in planar-type plasma processing device with a corrugated dielectric plate
Journal article   Peer reviewed

Numerical 3D simulation of surface wave excitation in planar-type plasma processing device with a corrugated dielectric plate

E. Abdel Fattah, I. Ganachev and H. Sugai
Vacuum, Vol.86(3), pp.330-334
08/10/2011

Abstract

Corrugated dielectric surface FDTD Surface wave plasma

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