Abstract
Electrically integrable, high-sensitivity, and high-reliability magnetic sensors are not yet realized at high temperatures (500 degrees C). In this study, an integrated on-chip single-crystal diamond (SCD) micro-electromechanical system (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense the external magnetic field, and electrically readout the resonance signal. The on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT(-1) from room temperature to 500 degrees C and a low noise level of 9.45 nT Hz(-1/2) up to 300 degrees C. The minimum fluctuation of the resonance frequency is 1.9 x 10(-6) at room temperature and 2.3 x 10(-6) at 300 degrees C. An SCD MEMS resonator array with parallel electric readout is subsequently achieved, thus providing a basis for the development of magnetic image sensors. The present study facilitates the development of highly integrated on-chip MEMS resonator transducers with high performance and high thermal stability.