Abstract
Lithium (0, 1, 3, 5%) doped Ba
0.55
Sr
0.45
TiO
3
(BLST) thin films have been successfully manufactured by growing Li
2
O-doped Ba
0.55
Sr
0.45
TiO
3
on the surface of p-type Si (111) substrate. Concentration of 1 M with annealing temperature of 850 °C for 15 hours was used in BST and BLST films. The Li dopant addition induced smaller lattice paramater, film thickness, gap energy, and greater refractive index. These results were supported by imaging surface morphology which Li
+
ion can replace Sr
2+
ion in the structure due to its small radius. Characterization of BST and BLST films structural showed they have cubic structure.