Abstract
The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6 degrees when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125 degrees C while the rest of the structure remains unaffected by the generated heat.