Abstract
High performance hybrid bilayer capacitor film has been developed by controlled deposition of silicon nitride (Si3N4) on polyethylene naphthalate (PEN). It was found that silicon nitride prepared with plasma-enhanced chemical vapor deposition can significantly increase the dielectric constant (K) and energy density of PEN by more than 20% and 50%, respectively. Moreover, the PEN/Si3N4 bilayer hybrid film also exhibits appropriate mechanical and thermal properties for capacitor winding. The high operating temperature and energy density of the PEN/Si3N4 bilayer dielectric film are very attractive for dc bus capacitors used in power inverters or converters found in hybrid electric vehicles, wind turbine generators, grid-tied photovoltaics, and smart grid, as well as pulsed power systems. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3646479]