Abstract
A novel process has been developed for fabricating ceramic dielectric structures with dimensions applicable to W-band millimetre wave dielectric resonator antennas. The ceramic dielectric structures are based on composites of SU-8 2150 photoresist and alumina (Al2O3)-alpha nanopowder. The effects of increasing the weight percentage of Al2O3 nanopowder on the photo-polymerisation of the SU-8-Al2O3 composite were systematically investigated. Cylindrical structures with thicknesses up to 500 mu m have been fabricated using single casted conventional ultraviolet lithography. The relative permittivity of SU-8-Al2O3 composites at different weight percentages of Al2O3 was studied showing an increase from a relative permittivity of 4.5 to 5.66 with increasing the Al2O3 weight percentage from 0 to 35%. Also, finally, double layer manufacturing of ceramic SU-8-Al2O3 composite structures was demonstrated.