Abstract
Undoped and aluminum-doped zinc oxide (ZnO) thin films have been grown on polycrystalline α-alumina substrates by ultrasonic spray pyrolysis (USP) technique using zinc acetate dihydrate and aluminum chloride hexahydrate (Al source) dissolved in methanol, ethanol and deionized water. A number of techniques, including X-ray diffraction (XRD), scanning electron microscopy (SEM), Fourier transform infrared (FTIR) spectroscopy, and photoluminescence (PL) were used to characterize the obtained ZnO thin films. It was seen that the orientation changed with increase in substrate temperature. During the ZnO deposition Zn source reacted with polycrystalline α-Al
2O
3 substrate to form an intermediate ZnAl
2O
4 spinel layer. It has been interestingly found that the intensity of green emission at 2.48
eV remarkably increased when the obtained ZnO:Al films were deposited at 380
°C. The FTIR absorbance intensity of spectroscopic band at 447±6
cm
−1 is very sensitive to oxygen sublattice disorder resulting from non-stoichiometry, which is consistent with the result of PL characterization.