Physical and electrical characterization of thin anodic oxides on Si(100)

Journal article

Peer reviewed

J. A Bardwell, P Schmuki, G. I Sproule, D Landheer and D. F Mitchell

Journal of the Electrochemical Society, Vol.142(11), pp.3933-3940

01/11/1995

Abstract

Applied sciences

Electronics

Exact sciences and technology

Interfaces

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Physical and electrical characterization of thin anodic oxides on Si(100)
Creators - without role: J. A Bardwell - Institute for Microstructural Sciences
P Schmuki - École Polytechnique Fédérale de Lausanne
G. I Sproule - Institute for Microstructural Sciences
D Landheer - Institute for Microstructural Sciences
D. F Mitchell - National res. council, inst. microstructural sci., Ottawa ON K1A 0R6, Canada
Publication Details: Journal of the Electrochemical Society, Vol.142(11), pp.3933-3940
Publisher: Electrochemical Society
Identifiers: 9938198708331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article