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Porosity as a function of stoichiometry and implantation temperature in Ge/Si1-xGex alloys (vol 119, 094303, 2016)
Journal article   Peer reviewed

Porosity as a function of stoichiometry and implantation temperature in Ge/Si1-xGex alloys (vol 119, 094303, 2016)

H. S. Alkhaldi, F. Kremer, T. Bierschenk, J. L. Hansen, A. Nylandsted-Larsen, J. S. Williams and M. C. Ridgway
Journal of applied physics, Vol.121(4)
28/01/2017

Abstract

Physical Sciences Physics Physics, Applied Science & Technology

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