Abstract
The synthesis of KCl nanowires has been achieved by atomic layer deposition inside high aspect ratio channels of microchannel glass. The average diameter of the KCl nanowires is 250 nm, with a minimum observed diameter of 50 nm, and lengths up to
5
μ
m
. The Cl precursor was
TaCl
5
, while the source of K was determined to be impurities in the microchannel glass substrate. The process for KC1 nanowire formation is a three-step chemical process that simultaneously etches K from the substrate concomitant with the formation of chlorine gas. It is postulated that the curvature of the channels may influence the diameters of the KCl nanowires.