Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

W Yue; Y Ren; J.A van Kan; S.-Y Chiam; L Jian; H.O Moser; T Osipowicz; F Watt

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Journal article

Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

W Yue, Y Ren, J.A van Kan, S.-Y Chiam, L Jian, H.O Moser, T Osipowicz and F Watt

01/07/2009

Abstract

Au microstructure

Electroplating

High aspect ratio

Proton beam writing

10.1016/j.nimb.2009.03.103 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 14 2376-2380 NIMBE

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Title: Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
Creators - without role: W Yue
Y Ren
J.A van Kan
S.-Y Chiam
L Jian
H.O Moser
T Osipowicz
F Watt
Identifiers: 9945171508331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article