RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

Journal article

V K Raman, F Mahmood, R A Mcmahon, H Ahmed, C Jeynes and D Sarkar

01/01/1989

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Title: RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS
Creators - without role: V K Raman
F Mahmood
R A Mcmahon
H Ahmed
C Jeynes
D Sarkar
Publisher: ELSEVIER SCIENCE BV
Identifiers: 9946093508331
Academic Unit: King Abdullah University of Science & Technology
Resource Type: Journal article