REACTIVE FORMATION OF COBALT SILICIDE ON SINGLE-CRYSTAL SILICON UNDER RAPID ELECTRON-BEAM HEATING

Journal article

F Mahmood, H Ahmed, C Jeynes and W P Gillin

01/05/1992

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Title: REACTIVE FORMATION OF COBALT SILICIDE ON SINGLE-CRYSTAL SILICON UNDER RAPID ELECTRON-BEAM HEATING
Creators - without role: F Mahmood
H Ahmed
C Jeynes
W P Gillin
Publisher: ELSEVIER SCIENCE BV
Identifiers: 9943680408331
Academic Unit: King Abdullah University of Science & Technology
Resource Type: Journal article