Abstract
This paper aims to develop a hysteresis model for a single axis piezoelectric nanopositioner stage at different operating points. The adopted methodology compares results based on the developed analytical simulation model using MATLAB with real time results using LabVIEW. The experimental results for real time measurements had been acquired for the piezoelectric nanopositioner stage using data acquisition system from National Instruments (NI). The experimental setup is described. The simulation and real time measurements results are compared to validate the adopted approach.