Recent advances in semiconductor factory automation, part 2: Equipment-level automation

Journal article

Peer reviewed

M Jeng, M C Zhou and TWY Chen

IEEE robotics & automation magazine, Vol.11(3), pp.4-4

01/09/2004

Abstract

Automation & Control Systems

Robotics

Science & Technology

Technology

1 Record Views

Title: Recent advances in semiconductor factory automation, part 2: Equipment-level automation
Creators - without role: M Jeng - National Taiwan Ocean University
M C Zhou
TWY Chen
Publication Details: IEEE robotics & automation magazine, Vol.11(3), pp.4-4
Publisher: IEEE
Number of pages: 1
Identifiers: 9939880008331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article