Recovery of perfluoroethane from chemical vapor deposition operations in the semiconductor industry

Journal article

Peer reviewed

J. G Wijmans, Z HE, T. T SU, R. W Baker and I Pinnau

Separation and purification technology, Vol.35(3), pp.203-213

01/03/2004

Abstract

Applied sciences

Chemical engineering

Exact sciences and technology

1 Record Views

Title: Recovery of perfluoroethane from chemical vapor deposition operations in the semiconductor industry
Creators - without role: J. G Wijmans - Membrane Technology & Research
Z HE - Membrane Technology & Research
T. T SU - Membrane Technology & Research
R. W Baker - Membrane Technology & Research
I Pinnau - Membrane Technology & Research
Publication Details: Separation and purification technology, Vol.35(3), pp.203-213
Publisher: Elsevier Science
Identifiers: 9945088008331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article