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Relative importance of deposition rate for surface potential in amorphous silicon/SiO2 interface
Journal article   Peer reviewed

Relative importance of deposition rate for surface potential in amorphous silicon/SiO2 interface

A Mosbah, M. S Aida and S Abdesselem
Journal of physics. D, Applied physics, Vol.35(16), pp.2015-2020
21/08/2002

Abstract

Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport in interface structures Exact sciences and technology Metal-insulator-semiconductor structures (including semiconductor-to-insulator) Physics

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