Retrospective sputter depth profiling using 3D mass spectral imaging

Journal article

Peer reviewed

Leiliang Zheng, Andreas Wucher and Nicholas Winograd

Surface and interface analysis, Vol.43(1-2), pp.41-44

01/2011

PMCID: PMC3863432

PMID: 24347744

Abstract

3D analysis

depth resolution

molecular depth profiling

organic multilayer analysis

1 Record Views

Title: Retrospective sputter depth profiling using 3D mass spectral imaging
Creators - without role: Leiliang Zheng - Pennsylvania State University
Andreas Wucher - University of Duisburg-Essen
Nicholas Winograd - Pennsylvania State University
Publication Details: Surface and interface analysis, Vol.43(1-2), pp.41-44
Publisher: John Wiley & Sons, Ltd
Number of pages: 4
Identifiers: 9944942708331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article