STUDY OF SILICON-OXIDES PREPARED BY OXYGEN IMPLANTATION INTO SILICON

Journal article

Peer reviewed

M H Badawi and K V Anand

Journal of physics. D, Applied physics, Vol.10(14), pp.1931-1942

01/10/1977

Abstract

Physical Sciences

Physics

Physics, Applied

Science & Technology

2 Record Views

Title: STUDY OF SILICON-OXIDES PREPARED BY OXYGEN IMPLANTATION INTO SILICON
Creators - without role: M H Badawi
K V Anand
Publication Details: Journal of physics. D, Applied physics, Vol.10(14), pp.1931-1942
Publisher: Iop Publishing Ltd
Number of pages: 12
Identifiers: 9915449608331
Academic Unit: Imam Abdulrahman Bin Faisal University
Language: English
Resource Type: Journal article