Abstract
A scanning homodyne interferometer is developed based on the combination of a modulated Mach-Zehnder interferometer and a high-precision two-dimensional translation stage. Due to its ultrahigh out-of-plane resolution (down to pico meters) and wide bandwidth potential, the scanning interferometer is well suited for characterization of piezoelectric thin films as well as for vibration measurement of microelectromechanical systems devices such as micromachined ultrasonic transducers.