Sign in
Selective porosification of n-InP(100) after focused ion beam implantation of Si
Journal article   Peer reviewed

Selective porosification of n-InP(100) after focused ion beam implantation of Si

U. Schlierf, G. Champion, G. I. Sproule, S. Moisa, J. W. Fraser, M. J. Graham and P. Schmuki
Physica status solidi. A, Applied research, Vol.197(1), pp.180-185
05/2003

Abstract

61.72.Tt 68.35.Ct 68.37.-d

Metrics

1 Record Views

Details