Self-latched micromachined mechanism with large displacement ratio

Journal article

Peer reviewed

A.-Q Liu, J LI, Z Liu, C LU, X. M Zhang and Michael Y Wang

Journal of microelectromechanical systems, Vol.15(6), pp.1576-1585

01/12/2006

Abstract

Applied sciences

Exact sciences and technology

General

Instruments, apparatus, components and techniques common to several branches of physics and astronomy

Mechanical engineering. Machine design

Mechanical instruments, equipment and techniques

Micromechanical devices and systems

Physics

Precision engineering, watch making

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Title: Self-latched micromachined mechanism with large displacement ratio
Creators - without role: A.-Q Liu - Nanyang Technological University
J LI - Nanyang Technological University
Z Liu - Institute of High Performance Computing
C LU - Institute of High Performance Computing
X. M Zhang - Nanyang Technological University
Michael Y Wang - Chinese University of Hong Kong
Publication Details: Journal of microelectromechanical systems, Vol.15(6), pp.1576-1585
Publisher: Institute of Electrical and Electronics Engineers
Identifiers: 9943636708331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article