Sequential turret source-masking system for fabrication of multilayer structures

Journal article

Peer reviewed

T. Anthopoulos and T. S. Shafai

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.18(5), pp.2595-2596

09/2000

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Title: Sequential turret source-masking system for fabrication of multilayer structures
Creators - without role: T. Anthopoulos - Staffordshire University
T. S. Shafai - Staffordshire University
Publication Details: Journal of vacuum science & technology. A, Vacuum, surfaces, and films, Vol.18(5), pp.2595-2596
Number of pages: 2
Identifiers: 9945888308331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article