Abstract
In this paper, we implement the Adomian decomposition method (ADM) to approximate the deflection of polysilicon diaphragm with small flexural rigidity of Micro Electro Mechanical System (MEMS) capacitive microphone. We prove the existence and the uniqueness of the solution of considered problem with the help of the theory of semi-group. Special attention is given to prove the convergence of the implemented method. Numerical simulation and comparison between the approximate solutions by using the ADM with the variational iteration method are given.